Suppression of phosphorus diffusion by carbon co-implantation (2006)
Attributed to:
University of Surrey Ion Beam Centre
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1063/1.2234315
Publication URI: http://dx.doi.org/10.1063/1.2234315
Type: Journal Article/Review
Parent Publication: Applied Physics Letters
Issue: 6