Boron diffusion and activation in SOI and bulk Si: The role of the buried interface (2007)
Attributed to:
University of Surrey Ion Beam Centre
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1016/j.nimb.2006.12.157
Publication URI: http://dx.doi.org/10.1016/j.nimb.2006.12.157
Type: Journal Article/Review
Parent Publication: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Issue: 1-2