Differential Hall characterisation of ultrashallow doping in advanced Si-based materials (2008)

First Author: Bennett N

Attributed to: University of Surrey Ion Beam Centre funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.mseb.2008.10.003

Publication URI: http://dx.doi.org/10.1016/j.mseb.2008.10.003

Type: Journal Article/Review

Parent Publication: Materials Science and Engineering: B