Dopant-stress synergy in Si solid-phase epitaxy (2008)

First Author: Rudawski N

Attributed to: University of Surrey Ion Beam Centre funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1063/1.2945291

Publication URI: http://dx.doi.org/10.1063/1.2945291

Type: Journal Article/Review

Parent Publication: Applied Physics Letters

Issue: 23