Interactions of photoresist stripping plasmas with nanoporous organo-silicate ultra low dielectric constant dielectrics (2008)

First Author: Lazzeri P

Attributed to: University of Surrey Ion Beam Centre funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.tsf.2007.08.043

Publication URI: http://dx.doi.org/10.1016/j.tsf.2007.08.043

Type: Journal Article/Review

Parent Publication: Thin Solid Films

Issue: 11