Structural and electrical characterisation of ion-implanted strained silicon (2008)
Attributed to:
University of Surrey Ion Beam Centre
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1016/j.mseb.2008.09.007
Publication URI: http://dx.doi.org/10.1016/j.mseb.2008.09.007
Type: Journal Article/Review
Parent Publication: Materials Science and Engineering: B