Microfabricated Quadrupole Mass Spectrometer With a Brubaker Prefilter (2010)
Attributed to:
Platform Support for 3D Electrical MEMS
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1109/jmems.2010.2040243
Publication URI: http://dx.doi.org/10.1109/jmems.2010.2040243
Type: Journal Article/Review
Parent Publication: Journal of Microelectromechanical Systems
Issue: 2