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A single-sided process for differentially cooled electrothermal micro-actuators (2008)

First Author: Veladi H

Attributed to: Platform Support for 3D Electrical MEMS funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/0960-1317/18/5/055033

Publication URI: http://dx.doi.org/10.1088/0960-1317/18/5/055033

Type: Journal Article/Review

Parent Publication: Journal of Micromechanics and Microengineering

Issue: 5