A single-sided process for differentially cooled electrothermal micro-actuators (2008)
Attributed to:
Platform Support for 3D Electrical MEMS
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1088/0960-1317/18/5/055033
Publication URI: http://dx.doi.org/10.1088/0960-1317/18/5/055033
Type: Journal Article/Review
Parent Publication: Journal of Micromechanics and Microengineering
Issue: 5