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Fabrication of 2D silicon nano-mold based on sidewall transfer (2011)

First Author: Rao J

Attributed to: Platform Support for 3D Electrical MEMS funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1049/mnl.2010.0155

Publication URI: http://dx.doi.org/10.1049/mnl.2010.0155

Type: Journal Article/Review

Parent Publication: Micro & Nano Letters

Issue: 1