Fabrication of 2D silicon nano-mold based on sidewall transfer (2011)
Attributed to:
Platform Support for 3D Electrical MEMS
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1049/mnl.2010.0155
Publication URI: http://dx.doi.org/10.1049/mnl.2010.0155
Type: Journal Article/Review
Parent Publication: Micro & Nano Letters
Issue: 1