Principles of free-space optical microelectromechanical systems (2008)

First Author: Syms R
Attributed to:  Platform Support for 3D Electrical MEMS funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1243/09544062jmes662

Publication URI: http://dx.doi.org/10.1243/09544062jmes662

Type: Journal Article/Review

Parent Publication: Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science

Issue: 1