Temperature-dependant study of phosphorus ion implantation in germanium (2012)

First Author: Razali M

Attributed to: University of Surrey Ion Beam Centre funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1063/1.4766522

Publication URI: http://dx.doi.org/10.1063/1.4766522

Type: Conference/Paper/Proceeding/Abstract