High dose ion irradiation effects on immiscible AlN/TiN nano-scaled multilayers (2013)
Attributed to:
University of Surrey Ion Beam Centre
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1016/j.tsf.2012.12.068
Publication URI: http://dx.doi.org/10.1016/j.tsf.2012.12.068
Type: Journal Article/Review
Parent Publication: Thin Solid Films