Reduction of phosphorus diffusion in germanium by fluorine implantation (2013)

First Author: El Mubarek H

Attributed to: University of Surrey Ion Beam Centre funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1063/1.4847555

Publication URI: http://dx.doi.org/10.1063/1.4847555

Type: Journal Article/Review

Parent Publication: Journal of Applied Physics

Issue: 22