Impact of the Aggressive Scaling on the Performance of FinFETs: the Role of a Single Dopant in the Channel (2013)

First Author: Aldegunde M

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1557/opl.2013.895

Publication URI: http://dx.doi.org/10.1557/opl.2013.895

Type: Journal Article/Review

Parent Publication: MRS Proceedings