AC analysis and simulation of smart electro-thermal microactuators (2012)
Attributed to:
Smart Microelectromechanical Systems (MEMS) Actuators
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1109/icit.2012.6209937
Publication URI: http://dx.doi.org/10.1109/icit.2012.6209937
Type: Conference/Paper/Proceeding/Abstract
ISBN: 978-1-4673-0340-8