A comprehensive Monte Carlo calculation of dopant contrast in secondary-electron imaging (2008)

First Author: Dapor M

Attributed to: Quantitative, high resolution two-and-three dimensional dopant mapping in the Scanning Electron Microscope by Secondary Electron Spectro-Micro funded by EPSRC

No abstract provided

Type: Journal Article/Review

Parent Publication: EPL (Europhysics Letters)

Issue: 3