Quantitative dopant contrast in the helium ion microscope (2009)

First Author: Jepson M

Attributed to: Quantitative, high resolution two-and-three dimensional dopant mapping in the Scanning Electron Microscope by Secondary Electron Spectro-Micro funded by EPSRC

No abstract provided

Type: Journal Article/Review

Parent Publication: EPL (Europhysics Letters)

Issue: 2