Resolution limits of secondary electron dopant contrast in helium ion and scanning electron microscopy. (2011)

First Author: Jepson M

Attributed to: Quantitative, high resolution two-and-three dimensional dopant mapping in the Scanning Electron Microscope by Secondary Electron Spectro-Micro funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1017/s1431927611000365

PubMed Identifier: 21745435

Publication URI: http://europepmc.org/abstract/MED/21745435

Type: Journal Article/Review

Volume: 17

Parent Publication: Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada

Issue: 4

ISSN: 1431-9276