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Plasma-based processes and thin film equipment for nano-scale device fabrication (2010)

First Author: Peng X

Attributed to: Creation of a National Innovation Playground to Widen the Operational Envelope for Tribological PVD Coatings funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1007/s10853-010-4974-6

Publication URI: http://dx.doi.org/10.1007/s10853-010-4974-6

Type: Journal Article/Review

Parent Publication: Journal of Materials Science

Issue: 1