Plasma-based processes and thin film equipment for nano-scale device fabrication (2010)
Attributed to:
Creation of a National Innovation Playground to Widen the Operational Envelope for Tribological PVD Coatings
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1007/s10853-010-4974-6
Publication URI: http://dx.doi.org/10.1007/s10853-010-4974-6
Type: Journal Article/Review
Parent Publication: Journal of Materials Science
Issue: 1