Statistical study of the influence of LER and MGG in SOI MOSFET (2014)
Attributed to:
Multiscale Modelling of Metal-Semiconductor Contacts for the Next Generation of Nanoscale Transistors
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1088/0268-1242/29/4/045005
Publication URI: http://dx.doi.org/10.1088/0268-1242/29/4/045005
Type: Journal Article/Review
Parent Publication: Semiconductor Science and Technology
Issue: 4