Statistical study of the influence of LER and MGG in SOI MOSFET (2014)

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/0268-1242/29/4/045005

Publication URI: http://dx.doi.org/10.1088/0268-1242/29/4/045005

Type: Journal Article/Review

Parent Publication: Semiconductor Science and Technology

Issue: 4