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Improved surface quality of anisotropically etched silicon {111} planes for mm-scale optics (2013)

First Author: Cotter J

Attributed to: Atom Chips - Integrated Circuits for Nanoscale Manipulation of Cold Atoms funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/0960-1317/23/11/117006

Publication URI: http://dx.doi.org/10.1088/0960-1317/23/11/117006

Type: Journal Article/Review

Parent Publication: Journal of Micromechanics and Microengineering

Issue: 11