Improved surface quality of anisotropically etched silicon {111} planes for mm-scale optics (2013)
Attributed to:
Atom Chips - Integrated Circuits for Nanoscale Manipulation of Cold Atoms
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1088/0960-1317/23/11/117006
Publication URI: http://dx.doi.org/10.1088/0960-1317/23/11/117006
Type: Journal Article/Review
Parent Publication: Journal of Micromechanics and Microengineering
Issue: 11