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An Ultralow-Resistance Ultrashallow Metallic Source/Drain Contact Scheme for III-V NMOS (2012)

First Author: Oxland R

Attributed to: III-V MOSFETs for Ultimate CMOS funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1109/led.2012.2185919

Publication URI: http://dx.doi.org/10.1109/led.2012.2185919

Type: Journal Article/Review

Parent Publication: IEEE Electron Device Letters

Issue: 4