Deformation behaviour of polysilicon components for MEMS (2012)
Attributed to:
Basic Technology Nanorobotics : Transfer to applications, new science and industry
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1088/0960-1317/22/10/105016
Publication URI: http://dx.doi.org/10.1088/0960-1317/22/10/105016
Type: Journal Article/Review
Parent Publication: Journal of Micromechanics and Microengineering
Issue: 10