Nanoscale deformation of MEMS materials (2011)
Attributed to:
Basic Technology Nanorobotics : Transfer to applications, new science and industry
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1557/opl.2011.656
Publication URI: http://dx.doi.org/10.1557/opl.2011.656
Type: Journal Article/Review
Parent Publication: MRS Proceedings