Vertical tracks on the sidewall of a silicon die using 3D holographic photolithography (2011)

First Author: Toriz-Garcia J

Attributed to: Sub-Micron 3D Holographic Lithography. funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/0960-1317/21/8/085034

Publication URI: http://dx.doi.org/10.1088/0960-1317/21/8/085034

Type: Journal Article/Review

Parent Publication: Journal of Micromechanics and Microengineering

Issue: 8