The influence of surface properties on the plasma dynamics in radio-frequency driven oxygen plasmas: Measurements and simulations (2013)
Attributed to:
Metrology concepts for a new generation of plasma manufacturing with atom-scale precision
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1063/1.4841675
Publication URI: http://dx.doi.org/10.1063/1.4841675
Type: Journal Article/Review
Parent Publication: Applied Physics Letters
Issue: 24