Interacting kinetics of neutral and ionic species in an atmospheric-pressure helium-oxygen plasma with humid air impurities (2013)
Attributed to:
Metrology concepts for a new generation of plasma manufacturing with atom-scale precision
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1088/0963-0252/22/4/045010
Publication URI: http://dx.doi.org/10.1088/0963-0252/22/4/045010
Type: Journal Article/Review
Parent Publication: Plasma Sources Science and Technology
Issue: 4