High power impulse magnetron sputtering: Current-voltage-time characteristics indicate the onset of sustained self-sputtering (2007)
Attributed to:
Fundamentals of High Power Impulse Magnetron Sputtering (HIPIMS) - Plasma Studies and Materials Synthesis
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1063/1.2817812
Publication URI: http://dx.doi.org/10.1063/1.2817812
Type: Journal Article/Review
Parent Publication: Journal of Applied Physics
Issue: 11