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Deposition of nanoscale multilayer CrN/NbN physical vapor deposition coatings by high power impulse magnetron sputtering (2008)

First Author: Purandare Y

Attributed to: Fundamentals of High Power Impulse Magnetron Sputtering (HIPIMS) - Plasma Studies and Materials Synthesis funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1116/1.2839855

Publication URI: http://dx.doi.org/10.1116/1.2839855

Type: Journal Article/Review

Parent Publication: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Issue: 2