Deposition of nanoscale multilayer CrN/NbN physical vapor deposition coatings by high power impulse magnetron sputtering (2008)
Attributed to:
Fundamentals of High Power Impulse Magnetron Sputtering (HIPIMS) - Plasma Studies and Materials Synthesis
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1116/1.2839855
Publication URI: http://dx.doi.org/10.1116/1.2839855
Type: Journal Article/Review
Parent Publication: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Issue: 2