Temporal Evolution of the Ion Fluxes for Various Elements in HIPIMS Plasma Discharge (2011)
Attributed to:
Fundamentals of High Power Impulse Magnetron Sputtering (HIPIMS) - Plasma Studies and Materials Synthesis
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1109/tps.2011.2106516
Publication URI: http://dx.doi.org/10.1109/tps.2011.2106516
Type: Journal Article/Review
Parent Publication: IEEE Transactions on Plasma Science
Issue: 4