Stress and texture in HIPIMS TiN thin films (2009)
Attributed to:
Fundamentals of High Power Impulse Magnetron Sputtering (HIPIMS) - Plasma Studies and Materials Synthesis
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1016/j.tsf.2009.09.069
Publication URI: http://dx.doi.org/10.1016/j.tsf.2009.09.069
Type: Journal Article/Review
Parent Publication: Thin Solid Films
Issue: 5