High power impulse magnetron sputtering using a rotating cylindrical magnetron (2010)
Attributed to:
Fundamentals of High Power Impulse Magnetron Sputtering (HIPIMS) - Plasma Studies and Materials Synthesis
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1116/1.3271136
Publication URI: http://dx.doi.org/10.1116/1.3271136
Type: Journal Article/Review
Parent Publication: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Issue: 1