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Laser Micromachining of Thin Beams for Silicon MEMS: Optimization of Cutting Parameters Using the Taguchi Method (2015)

First Author: Pusch T

Attributed to: An Innovative Electronics Manufacturing Research Centre funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1115/detc2015-48100

Publication URI: http://dx.doi.org/10.1115/detc2015-48100

Type: Conference/Paper/Proceeding/Abstract