Laser Micromachining of Thin Beams for Silicon MEMS: Optimization of Cutting Parameters Using the Taguchi Method (2015)

First Author: Pusch T
Attributed to:  An Innovative Electronics Manufacturing Research Centre funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1115/detc2015-48100

Publication URI: http://dx.doi.org/10.1115/detc2015-48100

Type: Conference/Paper/Proceeding/Abstract