High-Temperature (1200-1400°C) Dry Oxidation of 3C-SiC on Silicon (2015)

First Author: Sharma Y

Attributed to: Vehicle Electrical Systems Integration (VESI) funded by UKRI

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1007/s11664-015-3949-4

Publication URI: http://dx.doi.org/10.1007/s11664-015-3949-4

Type: Journal Article/Review

Parent Publication: Journal of Electronic Materials

Issue: 11