Numerical Study of the Impact of Vibration Localization on the Motional Resistance of Weakly Coupled MEMS Resonators (2015)

First Author: Erbes A

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1109/jmems.2014.2371072

Publication URI: http://dx.doi.org/10.1109/jmems.2014.2371072

Type: Journal Article/Review

Parent Publication: Journal of Microelectromechanical Systems

Issue: 4