Confining Liquids on Silicon Surfaces to Lubricate MEMS (2015)
Attributed to:
Implementing Lubrication in Micro-Electro-Mechanical Systems
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1007/s11249-015-0541-2
Publication URI: http://dx.doi.org/10.1007/s11249-015-0541-2
Type: Journal Article/Review
Parent Publication: Tribology Letters
Issue: 1