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Electron beam lithography tri-layer lift-off to create ultracompact metal/metal oxide 2D patterns on CaF2 substrate for surface-enhanced infrared spectroscopy (2015)

First Author: Wang Y

Attributed to: Complex nanophotonic and plasmonic networks for ultrafast optical devices funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.mee.2015.01.041

Publication URI: http://dx.doi.org/10.1016/j.mee.2015.01.041

Type: Journal Article/Review

Parent Publication: Microelectronic Engineering