Fabrication and characterisation of suspended narrow silicon nanowire channels for low-power nano-electro-mechanical (NEM) switch applications (2015)

First Author: Boodhoo L
Attributed to:  Nonvolatile atom transistors and low-power logic systems funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.mee.2015.02.047

Publication URI: http://dx.doi.org/10.1016/j.mee.2015.02.047

Type: Journal Article/Review

Parent Publication: Microelectronic Engineering