Investigation of focused ion beam induced damage in single crystal diamond tools (2015)

First Author: Tong Z
Attributed to:  Miniature Flexible & Reconfigurable Manufacturing System for 3D Micro-products funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.apsusc.2015.04.120

Publication URI: http://dx.doi.org/10.1016/j.apsusc.2015.04.120

Type: Journal Article/Review

Parent Publication: Applied Surface Science