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Growth of free-standing wurtzite AlGaN by MBE using a highly efficient RF plasma source (2016)

First Author: Novikov S

Attributed to: Free-standing wurtzite AlGaN substrates for deep ultraviolet (DUV) devices. funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1116/1.4940155

Publication URI: http://dx.doi.org/10.1116/1.4940155

Type: Journal Article/Review

Parent Publication: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Issue: 2