Improving metal/semiconductor conductivity using AlO x interlayers on n-type and p-type Si (2014)
Attributed to:
Atomic Layer Interface Engineering for Nanoelectronics (ALIEN): Contacts
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1063/1.4892003
Publication URI: http://dx.doi.org/10.1063/1.4892003
Type: Journal Article/Review
Parent Publication: Applied Physics Letters
Issue: 5