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Development of phase shift lithography for the production of metal-oxide-metal diodes (2014)

First Author: Dodd L

Attributed to: High-resolution Electron Beam Lithography Critical Mass Grant funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1049/mnl.2014.0102

Publication URI: http://dx.doi.org/10.1049/mnl.2014.0102

Type: Journal Article/Review

Parent Publication: Micro & Nano Letters

Issue: 7