Investigation of SU8 as a structural material for fabricating passive millimeter-wave and terahertz components (2015)
Attributed to:
Micromachined Circuits For Terahertz Communications
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1117/1.jmm.14.4.044507
Publication URI: http://dx.doi.org/10.1117/1.jmm.14.4.044507
Type: Journal Article/Review
Parent Publication: Journal of Micro/Nanolithography, MEMS, and MOEMS
Issue: 4