Investigation of SU8 as a structural material for fabricating passive millimeter-wave and terahertz components (2015)

First Author: Tian Y
Attributed to:  Micromachined Circuits For Terahertz Communications funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1117/1.jmm.14.4.044507

Publication URI: http://dx.doi.org/10.1117/1.jmm.14.4.044507

Type: Journal Article/Review

Parent Publication: Journal of Micro/Nanolithography, MEMS, and MOEMS

Issue: 4