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Review on Non-Volatile Memory with High-k Dielectrics: Flash for Generation Beyond 32 nm. (2014)

First Author: Zhao C

Attributed to: Liquid injection ALD of Cp- based precursors for deposition of dielectric materials funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.3390/ma7075117

PubMed Identifier: 28788122

Publication URI: http://europepmc.org/abstract/MED/28788122

Type: Journal Article/Review

Volume: 7

Parent Publication: Materials (Basel, Switzerland)

Issue: 7

ISSN: 1996-1944